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Goal:

To realize a miniature long-life vacuum chamber without active pumping for in-field use of measurement equipment under vacuum conditions. This can be fully integrated in high-tech measurements devices without the need of vacuum turbo pumps or any other vacuum equipment.

Approach:

We used high-performance getter materials to compensate for outgassing over a very long period of time. The assembly workflow of the miniature chamber is fully optimized to ensure long-life vacuum performance. These specific steps were found to be crucial. Extensive experiments were done with various identical chambers.

Miniature 100mm long-life vacuum chamber

Results:

A miniature vacuum chamber can hold a vacuum of << 6e-3 mbar (sensor minimum) for a period of over 3 years. This makes it suitable for in-field applications where it can be integrated in measurements systems without the necessity of a turbo pump.

Experimental measurements

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